Zygo unveils industry’s widest FOV interferometric objective

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Zygo, a business unit of AMETEK, Inc. and a global leader in precision metrology and optical solutions, launched its groundbreaking 0.5X ZWF (Zygo wide field) Objective — the widest field-of-view (FOV) interferometric objective commercially available. Engineered for high-speed, high-precision measurement applications, the 0.5X ZWF Objective is set to redefine efficiency and accuracy in industries such as semiconductor, precision machining, and photonics.

With an optical resolution of 19.0 µm, a working distance of 45mm, and a slope limit of 0.67°, the Zygo 0.5X ZWF objective is engineered to provide unmatched metrology capabilities in the most demanding industrial environments. (Courtesy: Zygo)

Invented and manufactured by Zygo, the 0.5X ZWF Objective offers an unparalleled FOV of up to 60mm in a single measurement, allowing for significantly faster data acquisition without compromising measurement integrity. This advancement enhances Zygo’s already impressive suite of metrology solutions, pushing the boundaries of performance for applications requiring large-area assessment and high-throughput production environments.

“With the launch of the 0.5X ZWF Objective, Zygo is addressing a critical industry need for high-speed, large-area metrology,” said Sean Leavy, product manager at Zygo. “This new objective not only accelerates measurement processes but also enhances the precision required for increasingly complex components in cutting-edge industries like AR waveguides and semiconductor manufacturing.”

Designed for both laboratory and in-line production environments, the 0.5X ZWF Objective streamlines metrology workflows by enabling fast and precise measurements for single-FOV samples, reducing inspection times and significantly improving throughput. It facilitates seamless stitching of large surfaces, providing rapid and reliable flatness and waviness assessments. Additionally, the objective is optimized for superior film measurement, consistent with all Zygo objectives, making it a powerful tool for enhanced optical layer analysis.

Zygo’s 0.5X ZWF Objective is further enhanced by the company’s Mx™ software suite, featuring intelligent tools such as Part Finder and SmartSetUp™, which simplify focus and alignment, ensuring repeatability and accuracy across expansive measurement areas. These innovations allow operators to measure large areas quickly and with confidence, minimizing manual intervention and maximizing efficiency.

More info www.zygo.com